Semiconductor-On-Insulator Materials for Nanoelectronics Applications
Semiconductor-On-Insulator Materials for Nanoelectronics Applications [electronic resource] /
edited by Alexei Nazarov, J.-P. Colinge, Francis Balestra, Jean-Pierre Raskin, Francisco Gamiz, V.S. Lysenko.
- 1st ed. 2011.
- IX, 447 p. online resource.
- Engineering Materials, 1612-1317 .
- Engineering Materials, .
New semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI.
"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
9783642158681
10.1007/978-3-642-15868-1 doi
Nanotechnology.
Semiconductors.
Materials science.
Nanotechnology and Microengineering.
Nanotechnology.
Semiconductors.
Characterization and Evaluation of Materials.
T174.7
620.5
New semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI.
"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
9783642158681
10.1007/978-3-642-15868-1 doi
Nanotechnology.
Semiconductors.
Materials science.
Nanotechnology and Microengineering.
Nanotechnology.
Semiconductors.
Characterization and Evaluation of Materials.
T174.7
620.5